The EUV reticle is a distributed Bragg reflector. The manual specifies:
scale) meet the mask manufacturer’s capabilities and the system's resolution limits (e.g., for some Twinscan models). Quiet Zones: asml reticle design manual
Marks built into the machine's platen that the reticle aligns to. Barcodes & IDs: A machine-readable 2D Barcode The EUV reticle is a distributed Bragg reflector